Nanometrics 2026-06-27T15:42:10.13528574Z 1 37.84 30.51 1100.0 3 37.84 30.51 1100.0 0.0 0.0 0.0 0.0 UNKNOWN 37.84 30.51 1100.0 0.0 0.0 0.0 0.0 UNKNOWN 37.84 30.51 1100.0 0.0 0.0 0.0 0.0 UNKNOWN